With a scanning galvanometer or two scanning galvanometer.

3 samples of 4-inch pilot program

3.1 (100mm) Ge single-chip, thickness: 230 ± 5ttm, Model: n-type.

3.2 The test conditions in this trial, the choice of wavelength 1064nm fiber-based laser marking machine, the choice of MODE0 mode, in the Ge groups of grinding process on-chip test. Laser power: Choose 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55% and 60%, such as several power test (n% indicated that the percentage of full power lasers).

3.3 The test equipment

1) Fluorescent: To observe the marking surface condition after the Ge films;

2) optical measuring instrument: To observe the marking of the surface condition after the Ge films;

3) measuring the depth: the depth of the test marking. 4 test results and analysis of test results.